ASU Electronic Theses and Dissertations
This collection includes most of the ASU Theses and Dissertations from 2011 to present. ASU Theses and Dissertations are available in downloadable PDF format; however, a small percentage of items are under embargo. Information about the dissertations/theses includes degree information, committee members, an abstract, supporting data or media.
In addition to the electronic theses found in the ASU Digital Repository, ASU Theses and Dissertations can be found in the ASU Library Catalog.
Dissertations and Theses granted by Arizona State University are archived and made available through a joint effort of the ASU Graduate College and the ASU Libraries. For more information or questions about this collection contact or visit the Digital Repository ETD Library Guide or contact the ASU Graduate College at firstname.lastname@example.org.
- 4 English
- 4 Public
- 2 Physics
- 2 XPS
- 1 ALD
- 1 Band alignment
- 1 CMP Cu
- 1 Condensed matter physics
- 1 High-k oxides
- 1 Interface
- 1 Materials Science
- 1 Nuclear physics and radiation
- 1 PECVD
- 1 PULSTAR
- 1 SQUID
- 1 UPS
- 1 adhesion layer
- 1 c-BN
- 1 chemical vapor deposition
- 1 cryogenics
- 1 cubic boron nitride
- 1 interdiffusion
- 1 low-k dielectrics
- 1 nEDM
- 1 neutron electric dipole moment
- 1 plasma enhanced chemical vapor deposition
- 1 plasma process
- 1 superconducting quantum interference device
- 1 surface interactions
Cubic boron nitride (c-BN) has potential for electronic applications as an electron emitter and serving as a base material for diodes, transistors, etc. However, there has been limited research on c-BN reported, and many of the electronic properties of c-BN and c-BN interfaces have yet to be reported. This dissertation focused on probing thin film c-BN deposited via plasma enhanced chemical vapor deposition (PECVD) with in situ photoelectron spectroscopy (PES). PES measurements were used to characterize the electronic properties of c-BN films and interfaces with vacuum and diamond. First, the interface between c-BN and vacuum were characterized with ultraviolet PES …
- Shammas, Joseph, Nemanich, Robert J, Ponce, Fernando, et al.
- Created Date
Seeking an upper limit of the Neutron Electric Dipole Moment (nEDM) is a test of charge-parity (CP) violation beyond the Standard Model. The present experimentally tested nEDM upper limit is 3x10^(26) e cm. An experiment to be performed at the Oak Ridge National Lab Spallation Neutron Source (SNS) facility seeks to reach the 3x10^(28) e cm limit. The experiment is designed to probe for a dependence of the neutron's Larmor precession frequency on an applied electric eld. The experiment will use polarized helium-3 (3He) as a comagnetometer, polarization analyzer, and detector. Systematic influences on the nEDM measurement investigated in this …
- Dipert, Robert Adam, Alarcon, Ricardo, Chamberlin, Ralph, et al.
- Created Date
In this dissertation, in-situ X-ray and ultraviolet photoemission spectroscopy have been employed to study the interface chemistry and electronic structure of potential high-k gate stack materials. In these gate stack materials, HfO2 and La2O3 are selected as high-k dielectrics, VO2 and ZnO serve as potential channel layer materials. The gate stack structures have been prepared using a reactive electron beam system and a plasma enhanced atomic layer deposition system. Three interrelated issues represent the central themes of the research: 1) the interface band alignment, 2) candidate high-k materials, and 3) band bending, internal electric fields, and charge transfer. 1) The …
- Zhu, Chiyu, Nemanich, Robert, Chamberlin, Ralph, et al.
- Created Date
In this dissertation, remote plasma interactions with the surfaces of low-k interlayer dielectric (ILD), Cu and Cu adhesion layers are investigated. The first part of the study focuses on the simultaneous plasma treatment of ILD and chemical mechanical polishing (CMP) Cu surfaces using N2/H2 plasma processes. H atoms and radicals in the plasma react with the carbon groups leading to carbon removal for the ILD films. Results indicate that an N2 plasma forms an amide-like layer on the surface which apparently leads to reduced carbon abstraction from an H2 plasma process. In addition, FTIR spectra indicate the formation of hydroxyl …
- Liu, Xin, Nemanich, Robert, Chamberlin, Ralph, et al.
- Created Date