ASU Electronic Theses and Dissertations
- 2 Public
The thesis focuses on cost-efficient integration of the electro-chemical residue sensor (ECRS), a novel sensor developed for the in situ and real-time measurement of the residual impurities left on the wafer surface and in the fine structures of patterned wafers during typical rinse processes, and wireless transponder circuitry that is based on RFID technology. The proposed technology uses only the NMOS FD-SOI transistors with amorphous silicon as active material with silicon nitride as a gate dielectric. The proposed transistor was simulated under the SILVACO ATLAS Simulation Framework. A parametric study was performed to study the impact of different gate lengths …
- Pandit, Vedhas, Vermeire, Bert, Barnaby, Hugh, et al.
- Created Date
In this work, a high resolution analog-to-digital converter (ADC) for use in harsh environments is presented. The ADC is implemented in bulk CMOS technology and is intended for space exploration, mining and automotive applications with a range of temperature variation in excess of 250°C. A continuous time (CT) sigma delta modulator employing a cascade of integrators with feed forward (CIFF) architecture in a single feedback loop topology is used for implementing the ADC. In order to enable operation in the intended application environments, an RC time constant tuning engine is proposed. The tuning engine is used to maintain linearity of …
- Anabtawi, Nijad, Barnaby, Hugh, Vermeire, Bert, et al.
- Created Date