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CMOS On-Chip 3D Inductor Design & Application in RF Bio-Sensing


Abstract Three-dimensional (3D) inductors with square, hexagonal and octagonal geometries have been designed and simulated in ANSYS HFSS. The inductors have been designed on Silicon substrate with through-hole via with different width, spacing and thickness. Spice modeling has been done in Agilent ADS and comparison has been made with results of custom excel based calculator and HFSS simulation results. Single ended quality factor was measured as 12.97 and differential ended quality factor was measured as 15.96 at a maximum operational frequency of 3.65GHz. The single ended and differential inductance was measured as 2.98nH and 2.88nH respectively at this frequency. Based on results a symmetric octagonal inductor design has been recommended to be us... (more)
Created Date 2012
Contributor Abbey, Hemanshu (Author) / Bakkaloglu, Bertan (Advisor) / Kiaei, Sayfe (Committee member) / Goryll, Michael (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / Biosensors / Design Metric for Onchip Inductors / Inductive Sensing / Octagonal Symmetric Inductors / OnChip Inductors / RF Biosensing
Type Masters Thesis
Extent 66 pages
Language English
Rights All Rights Reserved
Note M.S. Electrical Engineering 2012
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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Description Dissertation/Thesis