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3D System-On-Package (SoP) Signal Generator to Control MEMS Movable Microelectrode Arrays

Abstract Microelectrodes have been used as the neural interface to record brain's neural activities. Most of these electrodes are fixed positioned. Neural signal normally degrades over time due to the body immune response and brain micromotion that move the neurons away from the microelectrode. MEMS technology under SUMMiT VTM processes has developed miniaturized version of moveable microelectrodes that have the ability to recover the neural signal degradation by searching new cluster of neurons. To move the MEMS microelectrode a combination of four voltage waveforms must be applied to four thermally actuated microactuators. Previous design has used OmneticTM interconnect to transfer the waveforms from the external signal generators to the MEMS ... (more)
Created Date 2012
Contributor Tee, Zikai (Author) / Muthuswamy, Jitendran (Advisor) / Sutanto, Jemmy (Committee member) / Yu, Hongyu (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / 3D SoP / MEMS / microelectrodes
Type Masters Thesis
Extent 60 pages
Language English
Reuse Permissions All Rights Reserved
Note M.S. Electrical Engineering 2012
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis