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An Electrical Stimulus based Built In Self Test (BIST) circuit for Capacitive MEMS accelerometer

Abstract Micro Electro Mechanical Systems (MEMS) is one of the fastest growing field in silicon industry. Low cost production is key for any company to improve their market share. MEMS testing is challenging since input to test a MEMS device require physical stimulus like acceleration, pressure etc. Also, MEMS device vary with process and requires calibration to make them reliable. This increases test cost and testing time. This challenge can be overcome by combining electrical stimulus based testing along with statistical analysis on MEMS response for electrical stimulus and also limited physical stimulus response data. This thesis proposes electrical stimulus based built in self test(BIST) which can be used to get MEMS data and later this data can... (more)
Created Date 2013
Contributor Kundur, Vinay (Author) / Bakkaloglu, Bertan (Advisor) / Ozev, Sule (Advisor) / Bakkaloglu, Bertan (Committee member) / Ozev, Sule (Committee member) / Kiaei, Sayfe (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / BIST / capacitive accelerometer / Electrical stimulus / MEMS
Type Masters Thesis
Extent 82 pages
Language English
Reuse Permissions All Rights Reserved
Note M.S. Electrical Engineering 2013
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis