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Molecular Electronic Transducer-Based Seismometer and Accelerometer Fabricated With Micro-Electro-Mechanical Systems Techniques

Abstract This thesis presents approaches to develop micro seismometers and accelerometers based on molecular electronic transducers (MET) technology using MicroElectroMechanical Systems (MEMS) techniques. MET is a technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. It consists of an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. MET seismometers have advantages of high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed with inter-electrode spacing close to 1μm, whi... (more)
Created Date 2014
Contributor Huang, Hai (Author) / Yu, Hongyu (Advisor) / Jiang, Hanqing (Committee member) / Dai, Lenore (Committee member) / Si, Jennie (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / Accelerometer / MEMS / Micro-Fabrication / Molecular Electronic Transducer / Seismometer
Type Doctoral Dissertation
Extent 102 pages
Language English
Reuse Permissions All Rights Reserved
Note Ph.D. Electrical Engineering 2014
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis