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Development of Deformable Electronics using Microelectromechanical Systems (MEMS) based Fabrication Technologies


Abstract This dissertation presents my work on development of deformable electronics using microelectromechanical systems (MEMS) based fabrication technologies. In recent years, deformable electronics are coming to revolutionize the functionality of microelectronics seamlessly with their application environment, ranging from various consumer electronics to bio-medical applications. Many researchers have studied this area, and a wide variety of devices have been fabricated. One traditional way is to directly fabricate electronic devices on flexible substrate through low-temperature processes. These devices suffered from constrained functionality due to the temperature limit. Another transfer printing approach has been developed recently. The general ... (more)
Created Date 2014
Contributor Tang, Rui (Author) / Yu, Hongyu (Advisor) / Jiang, Hanqing (Committee member) / Pan, George (Committee member) / Goryll, Michael (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / Deformable electronics / MEMS / Origami-enabled fabrication / silicon solar cells / thermal flow sensor
Type Doctoral Dissertation
Extent 107 pages
Language English
Copyright
Reuse Permissions All Rights Reserved
Note Doctoral Dissertation Electrical Engineering 2014
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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Description Dissertation/Thesis