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Characterization of Oxide Thin Films and Interfaces Using Transmission Electron Microscopy


Abstract Multifunctional oxide thin-films grown on silicon and several oxide substrates have been characterized using High Resolution (Scanning) Transmission Electron Microscopy (HRTEM), Energy-Dispersive X-ray Spectroscopy (EDX), and Electron Energy-Loss Spectroscopy (EELS). Oxide thin films grown on SrTiO3/Si pseudo-substrate showed the presence of amorphised SrTiO3 (STO) at the STO/Si interface. Oxide/oxide interfaces were observed to be atomically clean with very few defects.

Al-doped SrTiO3 thin films grown on Si were of high crystalline quality. The Ti/O ratio estimated from EELS line scans revealed that substitution of Ti by Al created associated O vacancies. The strength of the crystal field in STO was measured using EELS, and decreased by... (more)
Created Date 2015
Contributor Dhamdhere, Ajit R. (Author) / SMITH, DAVID J (Advisor) / McCartney, Martha R. (Committee member) / Chamberlin, Ralph (Committee member) / Ponce, Fernando (Committee member) / Arizona State University (Publisher)
Subject Physics / Condensed matter physics / Materials Science / Interfaces / Oxides / TEM / Thin-films
Type Doctoral Dissertation
Extent 178 pages
Language English
Copyright
Reuse Permissions All Rights Reserved
Note Doctoral Dissertation Physics 2015
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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Description Dissertation/Thesis