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Modeling and Calibration of a MEMS Tensile Stage for Elevated Temperature Experiments on Freestanding Metallic Thin Films

Abstract Mechanical behavior of metallic thin films at room temperature (RT) is relatively well characterized. However, measuring the high temperature mechanical properties of thin films poses several challenges. These include ensuring uniformity in sample temperature and minimizing temporal fluctuations due to ambient heat loss, in addition to difficulties involved in mechanical testing of microscale samples. To address these issues, we designed and analyzed a MEMS-based high temperature tensile testing stage made from single crystal silicon. The freestanding thin film specimens were co-fabricated with the stage to ensure uniaxial loading. Multi-physics simulations of Joule heating, incorporating both radiation and convection heat transfer, were ca... (more)
Created Date 2016
Contributor Eswarappa Prameela, Suhas (Author) / Rajagopalan, Jagannathan (Advisor) / Wang, Liping (Committee member) / Jiao, Yang (Committee member) / Arizona State University (Publisher)
Subject Mechanics / Materials Science / High temperature / MEMS / Multi physics / nanocrystalline / Thermoreflectance / Titanium thin film
Type Masters Thesis
Extent 55 pages
Language English
Reuse Permissions All Rights Reserved
Note Masters Thesis Materials Science and Engineering 2016
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis