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Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation

Abstract The instrumentational measurement of seismic motion is important for a wide range of research fields and applications, such as seismology, geology, physics, civil engineering and harsh environment exploration. This report presents series approaches to develop Micro-Electro-Mechanical System (MEMS) enhanced inertial motion sensors including accelerometers, seismometers and inclinometers based on Molecular Electronic Transducers (MET) techniques.

Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed ... (more)
Created Date 2016
Contributor Liang, Mengbing (Author) / Yu, Hongyu (Advisor) / Dai, Lenore (Committee member) / Kozicki, Michael (Committee member) / Jiang, Hanqing (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / Chemical engineering / Mechanical engineering / Accelerometer / MEMS / Molecular Electronic Transducer / Seismometer / Sensor
Type Doctoral Dissertation
Extent 103 pages
Language English
Reuse Permissions All Rights Reserved
Note Doctoral Dissertation Electrical Engineering 2016
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis