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A Bi-Directional Out-of-Plane Actuator by Electrostatic Force


Abstract Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator’s physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are ob... (more)
Created Date 2013-12-05
Contributor Ren, Hao (ASU author) / Wang, Weimin (Author) / Tao, Fenggang (Author) / Yao, Jun (Author) / Ira A. Fulton Schools of Engineering / School of Electrical, Computer and Energy Engineering
Series MICROMACHINES
Type Text
Extent 13 pages
Language English
Identifier DOI: 10.3390/mi4040431 / ISSN: 2072-666X
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Citation Ren, H., Wang, W., Tao, F., & Yao, J. (2013). A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines, 4(4), 431-443. doi:10.3390/mi4040431
Collaborating Institutions ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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