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An Electrical-Stimulus-Only BIST IC For Capacitive MEMS Accelerometer Sensitivity Characterization

Abstract Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that ensures the continuous reliability and accuracy is a crucial need. The main purpose of testing is to eliminate defective devices and to verify the qualifications of a product is met. The calibration process for capacitive MEMS devices, for the most part, entails the determination of the mechanical sensitivity. In this work, a physical-stimulus-free built-in-self-test (BIST) integrated circuit (IC) design characterizing the sensitivity of capacitive MEMS accelerometers is presented. The BIST circuity can extract the amplit... (more)
Created Date 2017
Contributor Ozel, Muhlis Kenan (Author) / Bakkaloglu, Bertan (Advisor) / Ozev, Sule (Advisor) / Kiaei, Sayfe (Committee member) / Ogras, Umit (Committee member) / Arizona State University (Publisher)
Subject Electrical engineering / Accelerometer / BIST / Capacitive / Electrical / MEMS / Stimulus
Type Doctoral Dissertation
Extent 82 pages
Language English
Reuse Permissions All Rights Reserved
Note Doctoral Dissertation Electrical Engineering 2017
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS

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Description Dissertation/Thesis