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Characterization of Perovskite Oxide/Semiconductor Heterostructures


Abstract Integrated oxide/semiconductor heterostructures have attracted intense interest for device applications which require sharp interfaces and controlled defects. The research of this dissertation has focused on the characterization of perovskite oxide/oxide and oxide/semiconductor heterostructures, and the analysis of interfaces and defect structures, using scanning transmission electrom microscopy (STEM) and related techniques.

The SrTiO3/Si system was initially studied to develop a basic understanding of the integration of perovskite oxides with semiconductors, and successful integration with abrupt interfaces was demonstrated. Defect analysis showed no misfit dislocations but only anti-phase boundaries (APBs) in the SrTiO3 (STO) films. Si... (more)
Created Date 2018
Contributor Wu, HsinWei (Author) / Smith, David J (Advisor) / McCartney, Martha r (Advisor) / Alford, Terry (Committee member) / Bertoni, Mariana (Committee member) / Arizona State University (Publisher)
Subject Materials Science / Physics / Aberration Corrected Electron Microscopy / Defect / Failure Analysis / Interface / Perovskite Oxide
Type Doctoral Dissertation
Extent 156 pages
Language English
Copyright
Reuse Permissions All Rights Reserved
Note Doctoral Dissertation Materials Science and Engineering 2018
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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Description Dissertation/Thesis