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Environmental Sensing Applications of Zinc Oxide Based Film Bulk Acoustic Resonator


Abstract Different environmental factors, such as ultraviolet radiation (UV), relative humidity (RH) and the presence of reducing gases (acetone and ethanol), play an important role in the daily life of human beings. UV is very important in a number of areas, such as astronomy, resin curing of polymeric materials, combustion engineering, water purification, flame detection and biological effects with more recent proposals like early missile plume detection, secure space-to-space communications and pollution monitoring. RH is a very common parameter in the environment. It is essential not only for human comfort, but also for a broad spectrum of industries and technologies. There is a substantial interest in the development of RH sensors for applicati... (more)
Created Date 2011
Contributor Qiu, Xiaotun (Author) / Yu, Hongyu (Advisor) / Christen, Jennifer Blain (Committee member) / Aberle, James (Committee member) / Jiang, Hanqing (Committee member) / Arizona State University (Publisher)
Subject Electrical Engineering / Film Bulk Acoustic Resonator / Sensor / Zinc Oxide
Type Doctoral Dissertation
Extent 150 pages
Language English
Copyright
Reuse Permissions All Rights Reserved
Note Ph.D. Electrical Engineering 2011
Collaborating Institutions Graduate College / ASU Library
Additional Formats MODS / OAI Dublin Core / RIS


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Description Dissertation/Thesis